Benefits of Heated Ion Implantation in Silicon Carbide with the IMPHEAT® Implanter

Nissin Ion Equipment ion implanters (IMPHEAT ®) are highly reliable and can precisely implant a wide variety of dopants into SiC wafers using our leading-edge technologies, including controlled high-temperature implants with precise beam angle control.

Ion implanters have made it possible to dope silicon carbide and enhance its material properties. Engineers and manufacturers are always seeking to improve upon existing SiC chips, and our production-proven ion implanters support that process in the most efficient and effective way possible.

Our implanters are also well known for their ability to provide heated ion implantation, sometimes referred to as “hot implants.” High-temperature ion implants provide additional benefits that extend beyond what traditional implantation provides.

The IMPHEAT® Production has proven wafer handling capability at high temperatures.  Nissin has been able to overcome early identified wafer bow issues and our customers have realized very stable wafter handling.

What Can Heated Ion Implanters Do?

The IMPHEAT® ion implanter can reliably maintain wafer temperature anywhere from room temperature to 500 degrees C (932 degrees Fahrenheit). The IMPHEAT ®can maintain excellent temperature uniformity across the wafer from the beginning to the end of the process. By using a heater on the platen, the wafer temperature are kept uniform during implantation.  This heat helps to address one of the more common challenges with SiC ion implantation: the ability to precision place dopants without damaging the crystal lattice.

In a heated environment, the Nissin IMPHEAT ® implanter design provides:

• Reduced Damaged to the SiC Wafer Surface
• Greater Overall Silicon Carbide Chip Performance and Reliability
• Better Ion Diffusion and Active Dopants

Learn More From Nissin Ion Equipment

Nissin makes some of the world’s best ion implanters, including the IMPHEAT®, capable of doping dozens of different ions into SiC and many other materials at high temperatures. Learn more about our ion implanters by contacting our team via our online form.