Company History

Company History

Nissin Equipment USA

Sumitomo Electric Industries, LTD.

  • Listed in NIKKEI 225
  • FY2020 Sales (Consolidated): ¥2,918 billon

Nissin Electric Co., LTD.

  • Listed in Tokyo Stock Exchange
  • Power distribution systems, Smart grid

Nissin Ion Equipment Co, LTD.

  • Products: Ion implantation tools

Nissin Ion Equipment USA, Inc.

  • Field Support, R&D
1973Technical cooperation between Nissin Electric Co., Ltd. and HVEE (High Voltage Engineering Europe) commenced
1974Production of ion implanter began
1978200-kV medium current ion implanter developed
1980Western Electric (current AT&T) 30-kV high current ion implanter technology incorporated
1981“NH-20C”, a 200-kV medium current ion implanter (belt conveyor end station), developed
1982“PR-200”, a 200-kV high current ion implanter, developed
1983Ion Equipment Division established
1984“NH-20SD”, a fully-automatic, dual end station for the “NH-20S” medium current ion implanter, released
1985“PR-80”, a 80-kV high current ion implanter, released
1986Kuze Factory established and moved, and rotational implant end station developed
1987“NH-20SR”, a new-type medium current ion implanter, released
1988“PR-80A”, a new-type high current ion implanter, and “NH-20SDR”, a new-type dual end station, released
Ion implanter business for manufacturing low-temperature poly-Silicon TFT(LTPS-TFT) displays begun
1989“NH-20SP”, an 8-inch parallel beam, medium current ion implanter, developed
“NH-40SR”, a 400-kV medium current ion implanter for mass production, delivered
1990The first ion implanter for manufacturing LTPS-TFT displays (ION DOPING®) delivered 
1991“EXCEED8000”, an 8-inch high current ion implanter, developed
1993“Ichimura Industrial Award” received for medium current ion implanter with a rotational implant mechanism 
1994“EXCEED2000”, a new-type medium current ion implanter, developed
“NH-50SR”, a 500-kV medium current ion implanter for mass production, developed 
1996Delivery of ion implanter for manufacturing LTPS-TFT displays (ION DOPING®) commenced
1997Nissin Electric Europe Limited established in Scotland
1998“EXCEED2000A”, an improved-type 8-inch parallel medium current ion implanter, released
Delivery of “ID5600” and “ID6700”, an ion implanter for manufacturing LTPS-TFT displays (ION DOPING®), commenced
1999Customer evaluation of the “EXCEED2300” ion implanter for 300-mm wafers commenced 
Production control transferred from Nissin Electric Co., Ltd., and Nissin Ion Equipment Co., Ltd. established
2000Delivery of “EXCEED2300”, an ion implanter for mass production of 300-mm wafers, commenced
2001Nissin Allis Union Ion Equipment Co., Ltd., a joint corporation, established in Taiwan
Representative office established in Shanghai, China
2002Nissin Ion Korea Co., Ltd., a joint corporation, established in South Korea
Nissin Allis Ion Equipment (Shanghai) Co., Ltd., a joint corporation, established in Shanghai, China
Nissin Ion Equipment Co., Ltd. Singapore Branch established
2003Capital increased from 490 to 1,500 million yen
2004“EXCEED3000AH”, a new-type ion implanter for 300-mm wafers, released
Delivery of “iG4”, an ion implanter for the manufacture of 4th-generation glass size (550’670 mm) LTPS-TFT displays, commenced
2005Shiga Plant/Plasma Technology R&D Center established in Koka City (Shiga Pref.).
Sales rights in connection with production control transferred from Nissin Electric Co., Ltd. 
2007“EXCEED9600A”, an ion implanter for 300-mm wafers with implantation energy range expanded to 960 KeV, released
2008“CLARIS”, a hybrid-type ion implanter using the world’s first cluster ion beam, released
2010Nissin Ion Equipment USA, Inc. established as a wholly-owned subsidiary in Texas, U.S.A.
Delivery of “IMPHEAT”, a new-type high temperature implanter for power semiconductor, commenced
2011Nissin Ion Hightech (Yangzhou) Co., Ltd. established as a wholly-owned production subsidiary in Yangzhou, Jiangsu Province, China
“iG5”, the world’s first ion implanter for manufacturing 5.5th-generation glass size (1300 ’ 1500 mm) LTPS-TFT displays, developed and delivered
“iG6”, the world’s first ion implanter for manufacturing 6th-generation glass size (1500 ’ 1800 mm) LTPS-TFT displays, developed and delivered
No. 2 building added to the Shiga Plant
R&D Center established at Nissin Ion Equipment USA, Inc., (a subsidiary in the U.S.) and a base established in Boston, Massachusetts, U.S.A.
2015Delivery of “BeyEX(-H)”, an ion implanter for semiconductor, commenced
Delivery of “EXCEED3000AH-8C”, an ion implanter for semiconductor, commenced
2016No.3 building added to the Shiga Plant
2017Delivery of “EXCEED400HY”, a hydrogen implanter for VCSEL
2019“IMPHEAT-Ⅱ”, a new-type high temperature implanter for power semiconductor, developed
2020An office building added to the Shiga Plant
Relocated a function of head office to Toji Office

Partner with Nissin

As semiconductor processes become more and more complex, the need for smart, cost-effective solutions has never been greater. Nissin Ion Equipment is growing in the United States and Worldwide because of our commitment to our valued customers. Let Nissin help you succeed with our innovative solutions and world class support.